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Characteristics and usuage

• High efficiency at super micro amount gas of ppb/ppt level
• Possible low pressure drop by honeycomb type
• Possible loading of every semiconductor process device by light and compact type
• Using on any gas at simiconductor process

Specification
Chemical classification
Indication	Object gas	Gas example	Semiconductr process
N	Alkalic	NH3	PHOTO
H	Acidic	HF	ETCHING
S	Sulfuric	H2S,SO2	FRESH AIR
C	Organic	TOC ,TOLUENE	DIFFUSION CLEANING
Efficiency
Upper Density	In case of 10~30 ppb
Bottom Density	1.0 ppb
Chemical Reation Formular
Alkalic gas	NH3+H3PO4-->(NH4)H2PO4
Acdic gas	2HF+K2CO3--->2KF+CO2+H2O
Sulfuric gas	3H2S+2KMnO4--->3S+2MnO2+2KOH+2H2O
Organic gas	BY PHYSICAL ADHESIVE THEORY

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